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Customer Driven Equipment, Materials and Device Solutions |
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201 Circle Drive North, Suite 102 Piscataway, New Jersey 08854 P: 732-469-1591 F: 732-469-1592
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1. CMOS transistor processing compatible with monolithic 3-D Integration B. Rajendran, R. S. Shenoy1, D. J. Witte, N. S. Chokshi2, R. L. DeLeon2, G. S. Tompa2 & R. F. W. Pease, presented at VMIC 2005.
2. High Mobility ZnO and GaN Fabricated by Laser Assisted Molecular Beam Deposition RL DeLeon, NS Chokshi, GS Tompa, M Li, WA Anderson, to be presented at the COLA 2005 conference. 3. Electrochromic thin films made by Laser Assisted Molecular Beam Deposition RL DeLeon, NS Chokshi, GS Tompa, PV Ashrit, presented at Fall MRS 2004. 4. Laser Assisted Molecular Beam Deposition of Thin Films for Gate Dielectric Applications, RL DeLeon, JF Garvey, GS Tompa, R Moore, H Efstathiadis, MRS symposium proceeding V 768, p 93. 5. Production of metal oxide thin films by pulsed arc molecular beam deposition, E. F. Rexer, D. B. Wilbur, Jeffery L. Mills, R. L. DeLeon and J. F. Garvey, Review of Scientific Instruments, 71, 2125 (2000) 6. Thin Film Formation by Laser Assisted Molecular Beam Deposition, R. L. DeLeon, P. N. Prasad and J. F. Garvey, Chapter 14 in, Nanostructured Materials edited by Vladimir M. Shalaev and Martin Moskovits ACS Symposium Series 679, (1997). 7. Laser Assisted Molecular Beam Deposition of Si, C and SiC Films, R. L. DeLeon, L. Sun, E. F. Rexer, J. Charlebois, J. F. Garvey, E. W. Forsythe and G. S. Tompa, Materials Research Society Symposium Proceedings Vol 441, p 573 (1997). 8. Progress in Thin Film Formation by Laser Assisted Molecular Beam Deposition (LAMBD), R. L. DeLeon, Mukesh P. Joshi, Eric F. Rexer, P. N. Prasad and J. F. Garvey, Applied Surface Science, V 127-129, p 321 (1998). 9. A Reactive Laser Ablation Source for the Production of Thin Films, Eric F. Rexer, Mukesh P. Joshi, R. L. DeLeon, P. N. Prasad and J. F. Garvey, Review of Scientific Instruments, 69, 3028 (1998) |